AKT®-PECVD System
Zapnix Semiconductor's AKT-PECVD platform is a state-of-the-art system specifically designed for depositing insulating films on large glass substrates, primarily for Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) applications. This platform leverages Plasma-Enhanced Chemical Vapor Deposition (PECVD) technology, which enhances the deposition process through the use of plasma, resulting in superior film quality and performance.
High-Quality Insulating Films: The AKT-PECVD platform excels in depositing high-quality insulating films, such as silicon nitride (SiNx) and silicon dioxide (SiO2). These films are crucial for the dielectric layers in LCD and OLED displays, providing excellent electrical insulation and protective properties.
Large Substrate Handling: One of the standout features of the AKT-PECVD platform is its ability to handle large glass substrates. The system is designed to accommodate Gen 8.5 (2200x2500 mm) and larger glass sizes, which are commonly used in modern display manufacturing. This capability allows manufacturers to produce larger displays with high throughput and efficiency.